Title :
Fabrication of self-organized carbon nanotubes on si substrates using nano-template by flame synthesis technique
Author :
Chen, Zhi ; Hu, Wenchong ; Yuan, Liming ; Saito, Kozo
Author_Institution :
University of Kentucky
Abstract :
We present the successful fabrication, for the first time, of highly ordered C nanotube arrays on a silicon substrate using an anodized Al2O3 template by the flame synthesis method. This demonstrated the possibility for integration of carbon nanotube-based devices with Si integrated circuits
Keywords :
Aluminum; Carbon nanotubes; Fabrication; Fires; Mechanical engineering; Molecular electronics; Nanoscale devices; Organic materials; Silicon; Substrates;
Conference_Titel :
Semiconductor Device Research Symposium, 2001 International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-7432-0
DOI :
10.1109/ISDRS.2001.984503