• DocumentCode
    2258076
  • Title

    ASMC 96 Invited Speakers [biographies]

  • fYear
    1996
  • fDate
    12-14 Nov. 1996
  • Firstpage
    470
  • Lastpage
    479
  • Abstract
    Contains an entry for each author and co-author included in this conference proceedings record.
  • Keywords
    Biographies;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996
  • Conference_Location
    Cambridge, MA, USA
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-3371-3
  • Type

    conf

  • DOI
    10.1109/ASMC.1996.558122
  • Filename
    558122