DocumentCode
2258076
Title
ASMC 96 Invited Speakers [biographies]
fYear
1996
fDate
12-14 Nov. 1996
Firstpage
470
Lastpage
479
Abstract
Contains an entry for each author and co-author included in this conference proceedings record.
Keywords
Biographies;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996
Conference_Location
Cambridge, MA, USA
ISSN
1078-8743
Print_ISBN
0-7803-3371-3
Type
conf
DOI
10.1109/ASMC.1996.558122
Filename
558122
Link To Document