DocumentCode :
2258174
Title :
A MEMS-based programmable diffraction grating for optical holography in the spectral domain
Author :
Butler, M.A. ; Senturia, S.D. ; Deutsch, E.R. ; Sinclair, M.B. ; Sweatt, W.C. ; Youngner, D.W. ; Hocker, G.B.
Author_Institution :
Polychromix, Inc, Woburn, MA, USA
fYear :
2001
fDate :
2001
Firstpage :
422
Abstract :
Summary form only given. Spatial holography stores the shape of an object by recording the phase profile of a monochromatic optical beam. Similarly, the spectral content of an optical beam can be recreated from a stored phase profile of a polychromatic optical beam. Such phase profiles have been created by etching silicon and also with a MEMS-based programmable, diffraction grating. This talk will describe how phase profiles are create to reproduce specific spectral profiles, the development of the programmable diffraction grating, and several potential applications of such a technology
Keywords :
holographic gratings; masks; micromechanical devices; MEMS-based programmable diffraction grating; optical holography; polychromatic optical beam; spectral domain; spectral profiles; stored phase profile; Chemicals; Diffraction gratings; Frequency; Holographic optical components; Holography; Lighting control; Optical beams; Optical diffraction; Optical sensors; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Device Research Symposium, 2001 International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-7432-0
Type :
conf
DOI :
10.1109/ISDRS.2001.984534
Filename :
984534
Link To Document :
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