Title :
Nanofabrication of sub-wavelength grating using ultra-fine nano-machining process
Author :
Nakajima, Jun ; Koyama, Fumio
Author_Institution :
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama
Abstract :
We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.
Keywords :
diffraction gratings; integrated optoelectronics; micro-optomechanical devices; micromachining; moulding; nanotechnology; optical fabrication; nanofabrication; nanostructured photonic devices; size 20 nm; sub-wavelength grating; thermal nanoimprint mold; ultra-fine nanomachining process; Gratings; Lithography; Nanofabrication; Nanolithography; Nanoscale devices; Optical device fabrication; Optical devices; Optical waveguides; Photonic crystals; Substrates; (220.4000) Microstructure fabrication; (220.4241) Nanostructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
