DocumentCode
2258391
Title
Nanofabrication of sub-wavelength grating using ultra-fine nano-machining process
Author
Nakajima, Jun ; Koyama, Fumio
Author_Institution
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.
Keywords
diffraction gratings; integrated optoelectronics; micro-optomechanical devices; micromachining; moulding; nanotechnology; optical fabrication; nanofabrication; nanostructured photonic devices; size 20 nm; sub-wavelength grating; thermal nanoimprint mold; ultra-fine nanomachining process; Gratings; Lithography; Nanofabrication; Nanolithography; Nanoscale devices; Optical device fabrication; Optical devices; Optical waveguides; Photonic crystals; Substrates; (220.4000) Microstructure fabrication; (220.4241) Nanostructure fabrication;
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4572429
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