Title :
Chemical sensors based on surface plasmon resonance in Si grating structures
Author :
Nikitin, Petr I. ; Anokhin, Paval M. ; Beloglazov, Anatoli A.
Author_Institution :
Gen. Phys. Inst., Acad. of Sci., Moscow, Russia
Abstract :
The new concept of a Si-based surface plasmon resonance (SPR) sensor has been developed and successfully applied to chemical sensing. The sensitivity to nitrogen dioxide has been estimated at the level of tens of ppb. The Si-based SPR scheme provides an additional surface-enhanced Raman scattering (SERS) channel for data acquisition with spectroscopic selectivity and amplified sensitivity. Using two different SPR methods, the effect of reversible interaction of gold films with ppm concentrations of NO2 in air has been observed for the first time. The effect is likely to be associated with the gold film structure on an atomic scale and the nature of NO2 as a strong electroactive gas
Keywords :
elemental semiconductors; gas sensors; nitrogen compounds; silicon; surface enhanced Raman scattering; surface plasmons; Au; Au films; NO2; Si; Si grating structures; Si-based surface plasmon resonance sensor; air; amplified sensitivity; atomic scale; chemical sensing; chemical sensors; data acquisition; reversible interaction; sensitivity; spectroscopic selectivity; strong electroactive gas; surface plasmon resonance; surface-enhanced Raman scattering; Biomedical optical imaging; Chemical sensors; Gratings; Optical films; Optical sensors; Optical surface waves; Plasmons; Raman scattering; Resonance; Spectroscopy;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635489
