Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators

In this article, an inversion-based iterative control (IIC) approach is used to compensate for both the hysteresis and the vibrational dynamics effects of piezo actuators during high-speed, large-range tracking. We use the Hammerstein model to capture the piezo´s input-output behavior and to show the convergence of the iterative control algorithm. The IIC approach is illustrated by applying it to a piezo scanner on a atomic force microscope, and experimental results are presented to demonstrate the efficacy of the IIC technique in accounting for both the hysteresis and vibrational dynamics effects in high-speed, large-range tracking