Title :
Polymeric optical waveguide modulators and their applications
Author :
Steier, W.H. ; Szep, A. ; Kuo, Y.-H. ; Rabiei, P. ; Ahn, S.-W. ; Oh, M.-C. ; Zhang, H. ; Zhang, C. ; Erlig, H. ; Tsap, B. ; Fetterman, H.R. ; Chang, D.H. ; Dalton, L.R.
Author_Institution :
Dept. of Electr. Eng., Univ. of Southern California, Los Angeles, CA, USA
Abstract :
Summary form only given. We have fabricated and tested a number of different Mach Zehnder amplitude modulators. The devices are fabricated on silicon substrates with passive polymers used for the upper and lower claddings. The electro optic polymer core layer is patterned into ridge waveguides using RIE. The total thickness between the ground plane and the upper micro-strip line electrode was 7.5 /spl mu/m. The end facets of the waveguide were diced for light coupling.
Keywords :
electro-optical modulation; electrodes; integrated optics; microstrip lines; optical fabrication; optical polymers; optical waveguides; ridge waveguides; silicon; substrates; 7.5 micron; Mach Zehnder amplitude modulators; electro optic polymer core layer; lower claddings; passive polymers; polymeric optical waveguide modulators; ridge waveguides; silicon substrates; upper claddings; upper micro-strip line electrode; Frequency; Loss measurement; Optical films; Optical interferometry; Optical materials; Optical modulation; Optical polymers; Optical waveguides; Optical wavelength conversion; Thermal stability;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1033408
