Design and modeling of a high-speed scanner for atomic force microscopy

Author

Schitter, Georg ; Åström, Karl J. ; DeMartini, Barry ; Fantner, Georg E. ; Turner, Kimberly ; Thurner, Philipp J. ; Hansma, Paul K.

Author_Institution

Dept. of Phys., California Univ., Santa Barbara, CA

fYear

2006

fDate

14-16 June 2006

Abstract

A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4.3 micrometers. The focus of this contribution is on the vertical positioning direction of the scanner, being the crucial axis of motion with the highest bandwidth and precision requirements for gentle imaging with the atomic force microscope. A mathematical model of the scanner dynamics is presented that will enable more accurate topography measurements with the high-speed AFM system

Keywords

atomic force microscopy; control system synthesis; image scanners; motion control; physical instrumentation control; position control; atomic force microscopy; high-speed scanner; motion axis; scanner dynamics; topography measurements; vertical positioning direction; Adaptive control; Atomic force microscopy; Atomic measurements; Biological materials; Feedback; Mathematical model; Physics; Resonance; Resonant frequency; Surfaces;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 2006

Conference_Location

Minneapolis, MN

Print_ISBN

1-4244-0209-3

Electronic_ISBN

1-4244-0209-3

Type

conf

DOI

10.1109/ACC.2006.1655406

Filename

1655406