DocumentCode
2261871
Title
Reliability study of shape factors on metal-insulator-metal (MIM) capacitors
Author
Wan, S.Y. ; Wang, Pei Ying ; Chang, Alan ; Chen, Flora ; Chen, Carol ; Chou, Frank ; Hua, Chang-Hwang ; Wang, Y.C.
Author_Institution
WIN Semicond. Corp., Tao Yuan Shien, Taiwan
fYear
2009
fDate
11-11 Oct. 2009
Firstpage
73
Lastpage
84
Abstract
In this work a linear field model is adopted to study the reliability of capacitors which are manufacturing in Win´s production line. Two testing techniques, a constant voltage and a ramped voltage testing modes, are compared in order to examine in various sizes and shapes which testing techniques may give us a better way to predict the capacitor lifetime. It seems to us that the constant voltage test can give us an appropriate way for predicting the reliability of capacitors.
Keywords
MIM devices; capacitors; reliability; MIM capacitors; Win´s production line; capacitor lifetime; constant voltage testing mode; linear field model; metal-insulator-metal capacitors; ramped voltage testing mode; reliability; shape factors; Acceleration; Dielectrics; Life estimation; Life testing; Lifetime estimation; MIM capacitors; Metal-insulator structures; Shape; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability of Compound Semiconductors Digest (ROCS), 2009
Conference_Location
Greensboro, NC
Print_ISBN
978-0-7908-0124-7
Type
conf
Filename
5313982
Link To Document