Title :
Reliability study of shape factors on metal-insulator-metal (MIM) capacitors
Author :
Wan, S.Y. ; Wang, Pei Ying ; Chang, Alan ; Chen, Flora ; Chen, Carol ; Chou, Frank ; Hua, Chang-Hwang ; Wang, Y.C.
Author_Institution :
WIN Semicond. Corp., Tao Yuan Shien, Taiwan
Abstract :
In this work a linear field model is adopted to study the reliability of capacitors which are manufacturing in Win´s production line. Two testing techniques, a constant voltage and a ramped voltage testing modes, are compared in order to examine in various sizes and shapes which testing techniques may give us a better way to predict the capacitor lifetime. It seems to us that the constant voltage test can give us an appropriate way for predicting the reliability of capacitors.
Keywords :
MIM devices; capacitors; reliability; MIM capacitors; Win´s production line; capacitor lifetime; constant voltage testing mode; linear field model; metal-insulator-metal capacitors; ramped voltage testing mode; reliability; shape factors; Acceleration; Dielectrics; Life estimation; Life testing; Lifetime estimation; MIM capacitors; Metal-insulator structures; Shape; Silicon; Voltage;
Conference_Titel :
Reliability of Compound Semiconductors Digest (ROCS), 2009
Conference_Location :
Greensboro, NC
Print_ISBN :
978-0-7908-0124-7