• DocumentCode
    2262489
  • Title

    Session I: Semiconductor Materials and Technologies for Building the Sensors and Microsystems

  • fYear
    2005
  • fDate
    1-5 July 2005
  • Firstpage
    11
  • Lastpage
    11
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
  • Conference_Location
    Erlagol, Altai, Russia
  • ISSN
    1815-3712
  • Print_ISBN
    5-7782-0491-4
  • Type

    conf

  • DOI
    10.1109/SIBEDM.2005.195567
  • Filename
    1523172
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2262489