Title :
Efficient characterization method for MEMS devices
Author_Institution :
Chemnitz Univ. of Technol., Germany
Abstract :
The paper deals with a characterization method for MEMS devices based on the combination of measurement and simulation results. The aim of this method is to determine geometrical parameters and built-in mechanical stress in MEMS. The method is introduced by the example of an electrostatically actuated micro mirror array. Accuracy of geometrical parameters definition is about 1-2 %. Mechanical deformations are determined with a resolution of 1-2 MPa.
Keywords :
deformation; finite element analysis; micromechanical devices; FEM simulation; MEMS characterization; electrostatically actuated micromirror array; frequency response function; geometrical parameters; mechanical deformations; mechanical stress; parameter identification; Chemical technology; Geometry; Iron; Manufacturing processes; Mechanical variables measurement; Microelectromechanical devices; Micromechanical devices; Mirrors; Spectroscopy; Stress measurement;
Conference_Titel :
Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
Print_ISBN :
5-7782-0491-4
DOI :
10.1109/SIBEDM.2005.195570
