DocumentCode
2262532
Title
Efficient characterization method for MEMS devices
Author
Shaporin, A.V.
Author_Institution
Chemnitz Univ. of Technol., Germany
fYear
2005
fDate
1-5 July 2005
Firstpage
21
Lastpage
26
Abstract
The paper deals with a characterization method for MEMS devices based on the combination of measurement and simulation results. The aim of this method is to determine geometrical parameters and built-in mechanical stress in MEMS. The method is introduced by the example of an electrostatically actuated micro mirror array. Accuracy of geometrical parameters definition is about 1-2 %. Mechanical deformations are determined with a resolution of 1-2 MPa.
Keywords
deformation; finite element analysis; micromechanical devices; FEM simulation; MEMS characterization; electrostatically actuated micromirror array; frequency response function; geometrical parameters; mechanical deformations; mechanical stress; parameter identification; Chemical technology; Geometry; Iron; Manufacturing processes; Mechanical variables measurement; Microelectromechanical devices; Micromechanical devices; Mirrors; Spectroscopy; Stress measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
ISSN
1815-3712
Print_ISBN
5-7782-0491-4
Type
conf
DOI
10.1109/SIBEDM.2005.195570
Filename
1523175
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