Title :
Initial stages of nanoislands formation on Si(111) 7×7 surface
Author :
Vershinin, Andrey V. ; Teys, Sergey A. ; Shwartz, Natalia L. ; Yanovitskaja, Zoya Sh ; Zverev, Alexey V.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
Investigation of a minimal stable nucleus on Si(111)-7×7 surface was carried out by interatomic potential calculations and STM image analyses. Potential relief for adatom diffusion through this surface was calculated using Tersoff potential. Calculations demonstrated that a tetramer formed in the center of 7×7 unit cell after low deposited dose may be considered as a minimal stable nucleus on Si(111)-7×7 surface.
Keywords :
elemental semiconductors; island structure; potential energy functions; scanning tunnelling microscopy; silicon; surface diffusion; STM image analyses; Si; Si(111) surface; Tersoff potential; adatom diffusion; interatomic potential calculations; minimal stable nucleus; nanoislands formation; potential relief; Atomic layer deposition; Cleaning; Helium; Image analysis; Image reconstruction; Physics; Silicon; Surface reconstruction; Vacuum systems; Voltage;
Conference_Titel :
Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
Print_ISBN :
5-7782-0491-4
DOI :
10.1109/SIBEDM.2005.195571
