Title :
The ultrasonic sputtering of liquid
Author :
Khmelev, Vladimir N. ; Shalunov, Andrey V. ; Barsukov, Roman V. ; Tsyganok, Sergey N. ; Slivin, Aleksey N.
Author_Institution :
Biysk Technol. Inst., Altay State Tech. Univ., Russia
Abstract :
This article is devoted to the problem of viscous liquids sputtering by high intensity ultrasonic oscillations. Theoretical analysis shows the way of efficient increasing due to an optimum criteria of the cavitation process control choice. The results of the carried out researches can confirm the reliability of the chosen criteria and the peak efficiency of the viscous liquids ultrasonic dispersion process.
Keywords :
liquids; oscillations; sputtering; ultrasonic applications; ultrasonic devices; viscosity; cavitation process control; high intensity ultrasonic oscillations; ultrasonic dispersion process; ultrasonic sputtering; viscous liquids sputtering; Aerosols; Fuel processing industries; Helium; Liquids; Metals industry; Process control; Productivity; Senior members; Spraying; Sputtering;
Conference_Titel :
Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
Print_ISBN :
5-7782-0491-4
DOI :
10.1109/SIBEDM.2005.195601
