• DocumentCode
    2263569
  • Title

    The Muller scattering matrix of typical dust like particles in UV band

  • Author

    Bai Lu ; Wu Zhen-sen ; Tuo, Li ; Hai-Ying, Li

  • Author_Institution
    Phys. Dept., Xidian Univ., Xi´´an, China
  • fYear
    2010
  • fDate
    Nov. 29 2010-Dec. 2 2010
  • Firstpage
    441
  • Lastpage
    444
  • Abstract
    The light scattering properties of particles in UV band have critical particularly applications in subsurface defects detect surface micro-roughness measure and particulate contamination automatic checkout etc. In this paper the Muller scattering matrix of typical dust like particles in UV band is presented. The rigorously null-field methods are used to calculate the scattering Muller matrix of the scatterer. The influence of refractive index, incident wave length and the structure of the aggregate particles on scattering characteristic and polarizability are analyzed.
  • Keywords
    S-matrix theory; dust; light polarisation; light scattering; refractive index; surface roughness; Muller scattering matrix; UV band; dust like particles; incident wave length; light scattering property; optical lithography; particulate contamination automatic checkout; refractive index; subsurface defects; surface microroughness measure detection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Antennas Propagation and EM Theory (ISAPE), 2010 9th International Symposium on
  • Conference_Location
    Guangzhou
  • Print_ISBN
    978-1-4244-6906-2
  • Type

    conf

  • DOI
    10.1109/ISAPE.2010.5696496
  • Filename
    5696496