Title :
The Muller scattering matrix of typical dust like particles in UV band
Author :
Bai Lu ; Wu Zhen-sen ; Tuo, Li ; Hai-Ying, Li
Author_Institution :
Phys. Dept., Xidian Univ., Xi´´an, China
fDate :
Nov. 29 2010-Dec. 2 2010
Abstract :
The light scattering properties of particles in UV band have critical particularly applications in subsurface defects detect surface micro-roughness measure and particulate contamination automatic checkout etc. In this paper the Muller scattering matrix of typical dust like particles in UV band is presented. The rigorously null-field methods are used to calculate the scattering Muller matrix of the scatterer. The influence of refractive index, incident wave length and the structure of the aggregate particles on scattering characteristic and polarizability are analyzed.
Keywords :
S-matrix theory; dust; light polarisation; light scattering; refractive index; surface roughness; Muller scattering matrix; UV band; dust like particles; incident wave length; light scattering property; optical lithography; particulate contamination automatic checkout; refractive index; subsurface defects; surface microroughness measure detection;
Conference_Titel :
Antennas Propagation and EM Theory (ISAPE), 2010 9th International Symposium on
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4244-6906-2
DOI :
10.1109/ISAPE.2010.5696496
