Polymer waveguide optical interconnections on Si CMOS circuits

Author

Sang-Yeon Cho ; Thomas, M. ; Dae-Ik Kim ; Jokerst, N.M. ; Brooke, M.

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2002

fDate

24-24 May 2002

Abstract

Summary form only given. We report demonstrations of optical interconnections on foundry Si CMOS circuits using polymer optical waveguides. The polymer optical waveguides were directly fabricated on two Si CMOS circuits. The cladding/planarization layer was benzocyclobutene (BCB) and polyetherimide (ULTEM) was used as the waveguide core material.

Keywords

CMOS integrated circuits; integrated circuit technology; integrated optoelectronics; optical fabrication; optical interconnections; optical polymers; optical waveguides; silicon; BCB; Si; Si CMOS circuits; ULTEM; benzocyclobutene; cladding/planarization layer; foundry Si CMOS circuits; optical interconnections; polyetherimide; polymer optical waveguides; waveguide core material; Biomedical optical imaging; Integrated circuit interconnections; Integrated optics; Optical interconnections; Optical polymers; Optical scattering; Optical sensors; Optical surface waves; Optical waveguides; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the

Conference_Location

Long Beach, CA, USA

Print_ISBN

1-55752-706-7

Type

conf

DOI

10.1109/CLEO.2002.1033562

Filename

1033562

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2263929