Polymer waveguide optical interconnections for electrical interconnection substrates

Summary form only given. An integration process and measured result of a fully embedded thin film MSM photodetector (PD) fabricated from InGaAs which is embedded in a polymer optical waveguide which is deposited on a Si substrate is presented, thus realizing the goal of three separate, independently optimized materials for the waveguide, substrate, and PD. The dark current and photocurrent produced by the evanescent field coupling from the optical waveguide into the embedded MSM PD are shown Measured dark and photocurrent were 60.6 nA and 1.2 /spl mu/A at 5 V, respectively. The coupling efficiency was estimated based on the measured responsivity and photocurrent of the thin film MSM PD and the launched optical power was calculated using a mode matching approach through FIMMWAVE software from Photon Design. The estimated coupling efficacy from the input optical waveguide to the embedded MSM PD was 71.74%.