Title :
A simple computation of acoustic fields in electrodes
Author :
Taziev, Rinat M.
Author_Institution :
Inst. of Semicond. Phys., Novosibirsk, Russia
Abstract :
The paper presents the computation method of acoustic fields in the electrode over a surface of piezoelectric substrate.
Keywords :
acoustic devices; acoustic field; surface acoustic waves; acoustic fields; electrodes; piezoelectric substrate; surface acoustic wave devices; Electrodes; Finite element methods; Stress; Substrates; Surface acoustic waves; acoustic fields; electrode; surface acoustic wave;
Conference_Titel :
Control and Communications (SIBCON), 2011 International Siberian Conference on
Conference_Location :
Krasnoyarsk
Print_ISBN :
978-1-4577-1069-8
DOI :
10.1109/SIBCON.2011.6072655
