DocumentCode
2264242
Title
A simple computation of acoustic fields in electrodes
Author
Taziev, Rinat M.
Author_Institution
Inst. of Semicond. Phys., Novosibirsk, Russia
fYear
2011
fDate
15-16 Sept. 2011
Firstpage
276
Lastpage
278
Abstract
The paper presents the computation method of acoustic fields in the electrode over a surface of piezoelectric substrate.
Keywords
acoustic devices; acoustic field; surface acoustic waves; acoustic fields; electrodes; piezoelectric substrate; surface acoustic wave devices; Electrodes; Finite element methods; Stress; Substrates; Surface acoustic waves; acoustic fields; electrode; surface acoustic wave;
fLanguage
English
Publisher
ieee
Conference_Titel
Control and Communications (SIBCON), 2011 International Siberian Conference on
Conference_Location
Krasnoyarsk
Print_ISBN
978-1-4577-1069-8
Type
conf
DOI
10.1109/SIBCON.2011.6072655
Filename
6072655
Link To Document