DocumentCode
2264322
Title
Biofilter technology: an innovative and real cost-effective system to remove VOCs (ES07)
Author
Jantschak, A. ; Daniels, Mats
fYear
2003
fDate
30 Sept.-2 Oct. 2003
Firstpage
10
Lastpage
13
Abstract
The Biofilter system is a real cost-effective system with excellent efficiency for VOC treatment. The Biofilter is the best technology for environmental protection and meets all requirements of German and European law. The application of this new technique in the semiconductor industry was an interesting challenge for the project team at Philips Semiconductors Hamburg (PSH). The results of this project demonstrate that it is possible to establish this innovative technology in the semiconductor industry.
Keywords
electronics industry; environmental factors; filtration; legislation; organic compounds; European law; German law; Philips Semiconductors Hamburg; VOCs (ES07); biofilter technology; environmental protection; semiconductor industry; volatile organic compounds; Biological systems; Chemical technology; Combustion; Costs; Electronics industry; Europe; Law; Legal factors; Oxidation; Volatile organic compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2003 IEEE International Symposium on
ISSN
1523-553X
Print_ISBN
0-7803-7894-6
Type
conf
DOI
10.1109/ISSM.2003.1243220
Filename
1243220
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