Title :
Optimal factory tool portfolios
Author_Institution :
Intel Corp., Rio Rancho, NM, USA
fDate :
30 Sept.-2 Oct. 2003
Abstract :
The selection of the number and type of tools for a wafer fabrication facility serves to determine, to a large degree, factory cycle time. Whether adding tools to an existing facility or deciding on the tool portfolio for a new fab, the determination of the tool portfolio is a critical decision. Presented in this paper is an approach for finding the optimal tool portfolio wherein it is desired to minimize both factory cycle time and factory variability, subject to constraints on expenditures, floor space, and any other factory constraints. This approach replaces the typical trial-and-error approach of simulations combined with heuristic search.
Keywords :
Chebyshev approximation; combinatorial mathematics; electronics industry; integrated circuit modelling; mathematical programming; semiconductor device manufacture; tools; factory constraints; factory cycle time; factory variability; floor space; optimal factory tool portfolios; trial error method; wafer fabrication; Chebyshev approximation; Cost function; Explosives; Fabrication; Neural networks; Packaging; Portfolios; Predictive models; Production facilities; Throughput;
Conference_Titel :
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Print_ISBN :
0-7803-7894-6
DOI :
10.1109/ISSM.2003.1243224
