Optimal factory tool portfolios

Author

Ignizio, J.P.

Author_Institution

Intel Corp., Rio Rancho, NM, USA

fYear

2003

fDate

30 Sept.-2 Oct. 2003

Firstpage

31

Lastpage

34

Abstract

The selection of the number and type of tools for a wafer fabrication facility serves to determine, to a large degree, factory cycle time. Whether adding tools to an existing facility or deciding on the tool portfolio for a new fab, the determination of the tool portfolio is a critical decision. Presented in this paper is an approach for finding the optimal tool portfolio wherein it is desired to minimize both factory cycle time and factory variability, subject to constraints on expenditures, floor space, and any other factory constraints. This approach replaces the typical trial-and-error approach of simulations combined with heuristic search.

Keywords

Chebyshev approximation; combinatorial mathematics; electronics industry; integrated circuit modelling; mathematical programming; semiconductor device manufacture; tools; factory constraints; factory cycle time; factory variability; floor space; optimal factory tool portfolios; trial error method; wafer fabrication; Chebyshev approximation; Cost function; Explosives; Fabrication; Neural networks; Packaging; Portfolios; Predictive models; Production facilities; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2003 IEEE International Symposium on

ISSN

1523-553X

Print_ISBN

0-7803-7894-6

Type

conf

DOI

10.1109/ISSM.2003.1243224

Filename

1243224