300 mm full-factory simulations for 90 nm and 65 nm IC manufacturing

We present key results of some enabling capabilities realized by the development and implementation of 300 mm full-factory simulation tools supporting Intel´s 90 nm high-volume manufacturing (HVM) and 65 nm technology development (TD) factories. We discuss key attributes of these simulators which are being utilized for strategic fab capacity planning, automation systems designs, and tactical execution decision-support for continuous improvement. These tools capture the dynamic behaviors of hundreds of production equipment supporting a high-mix environment and integrate automated material handling systems (AMHS) in these production simulations. The paper discusses specific topical areas where these tools have found widespread use and emphasizes the importance of periodic model validation to the real factory.