DocumentCode :
2264537
Title :
Determination of the local electron density based on millimeter wave interferometry II: Experimental operations and comparisons
Author :
Chen, Zhaoquan ; Liu, Minghai ; Hong, Lingli ; Zhou, Qiyan ; Hu, Xiwei
Author_Institution :
Coll. of Electr. & Inf. Eng., Anhui Univ. of Sci. & Technol., Huainan, China
fYear :
2010
fDate :
Nov. 29 2010-Dec. 2 2010
Firstpage :
618
Lastpage :
621
Abstract :
The determination method of the local electron density is shown based on millimeter wave interferometry and the electron density measuring is experimented on a cylindrical capacitively coupled plasmas (CCP) setup. Results show the excellent agreement between the radial density profiles in the central plane measured by interferometry with the proposed analysis method and by the Langmuir probe system.
Keywords :
electron density; microwave measurement; plasma density; plasma sources; radiowave interferometry; Langmuir probe system; central plane; cylindrical capacitively coupled plasmas setup; local electron density; millimeter wave interferometry; radial density profiles;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Antennas Propagation and EM Theory (ISAPE), 2010 9th International Symposium on
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4244-6906-2
Type :
conf
DOI :
10.1109/ISAPE.2010.5696541
Filename :
5696541
Link To Document :
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