Improvement of mini fab uptime by the multi-task and multi-functional tools

Author

Mikata, Y. ; Tanimoto, Keishi ; Ishii, Kazuki ; Oka, Shuichi

Author_Institution

HALCA Project, Assoc. of Super-Adv. Electron. Technol., Tsukuba, Japan

fYear

2003

fDate

30 Sept.-2 Oct. 2003

Firstpage

73

Lastpage

76

Abstract

Multi-task and multi-functional tools can achieve alternative operations for example LPCVD deposition of both Poly Si and SiN films with good repeatability and few particulate. Using those tools we can reduce total tool number and "only-one tool" which means one tool only exists for a type of tool in the fab. We have also considered mini-fab availabilities and evaluate both methods of a full calculation and an approximate calculation. The results show that the tool reduction is more effective to obtain good fab availability and uptime, especially the reduction of "only-one tool" is most important to improve mini-fab availability. The approximate calculation is simple to estimate the fab availability and has a possibility to extend mega-fab estimations.

Keywords

chemical vapour deposition; elemental semiconductors; integrated circuit manufacture; semiconductor device manufacture; semiconductor thin films; silicon; silicon compounds; LPCVD deposition; Si; SiN; SiN films; mini fab; multifunctional tools; multitask; poly Si films; repeatability; Cleaning; Costs; Flexible manufacturing systems; Furnaces; Logic; Production; Productivity; Semiconductor films; Silicon compounds; System-on-a-chip;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2003 IEEE International Symposium on

ISSN

1523-553X

Print_ISBN

0-7803-7894-6

Type

conf

DOI

10.1109/ISSM.2003.1243234

Filename

1243234