Inspection recipe management based on captured defect distribution

In-line defect inspection tools need a recipe for defect detection at each inspection step. Conventional recipe criteria do not adequately determine the quality of the recipe, so a new recipe evaluation measure called OAR (Overlooked Area Ratio) was developed to quantify the defect distribution of the inspection results. The OAR method was applied to actual inspection data, and the results verified the validity of the method.