Title :
General design rules for MEMS tunable optical filters
Author :
Mateus, C.F.R. ; Huang, M. ; Chang-Hasnain, C.J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
Summary from only given. Tunable optical filters are important for applications such as DWDM optical networks. Micromechanically actuated filters are desirable because of their wide tuning range, design flexibility and high yield. The device structure consists of epitaxial layers forming a single Fabry-Perot cavity, having two distributed Bragg reflectors (DBRs) and an air gap in-between. We recently reported >100 nm tuning around 1550 nm using a torsional structure. The purpose of this paper is to determine how scalable the various designs are and to establish the design rules. The design flow chart for a MEMS filter using deflection beams is shown.
Keywords :
distributed Bragg reflectors; micro-optics; micromechanical devices; optical communication equipment; optical design techniques; optical waveguide filters; wavelength division multiplexing; 1550 nm; DWDM optical networks; Fabry-Perot cavity; MEMS filter; air gap; deflection beams; design flow chart; design rules; micromechanically actuated filters; torsional structure; tunable optical filters; wide tuning range; Distributed Bragg reflectors; Epitaxial layers; Fabry-Perot; Flowcharts; Micromechanical devices; Optical design; Optical fiber networks; Optical filters; Optical tuning; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1033619
