Defect control strategies and defect-yield-correlations in consideration of defect capture rate

The influence of defect capture rate on defect line control strategies and defect-yield-correlation models is discussed. A theoretical model, describing the influence of measurement tool parameters in connection with chip design parameters, reveals that a considerable amount of defects cannot be detected generally. Practical examples support this experience. Consequences of these capture rate variations with respect to defect control concepts and defect-yield-correlations, under special consideration of product diversity within a production line, are deduced. Finally different concepts to handle these capture rate issues are roughly discussed.