Title :
Diffusion bay simulation and its impact on the overall FAB performance: a simplified example
Author :
Collins, D.W. ; Flores-Godoy, J.-J. ; Tsakalis, K.S. ; Hoppensteadt, F.C.
Author_Institution :
Arizona State Univ., Mesa, AZ, USA
fDate :
30 Sept.-2 Oct. 2003
Abstract :
In this presentation the importance of simulation as a tool to understand the behavior of systems and their interactions is discussed. As an example, with the help of simulations of a diffusion bay it was possible to compute the probability of failure of the equipment for different controllers. This information is then used in a simplified FAB to study the performance that can be expected for different scheduling policies.
Keywords :
failure analysis; integrated circuit manufacture; probability; production control; scheduling; controllers; diffusion bay simulation; failure equipment; overall FAB performance; probability; scheduling policies; Analytical models; Computational modeling; Discrete event simulation; Furnaces; Heating; Job shop scheduling; Production; Silicon; Temperature; Testing;
Conference_Titel :
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Print_ISBN :
0-7803-7894-6
DOI :
10.1109/ISSM.2003.1243291
