Title :
An approach of time-oriented-multiple-objective for production target setting of wafer fabrication
fDate :
30 Sept.-2 Oct. 2003
Abstract :
This paper presents a Time-Oriented-Multiple-Objective (TOMO) approach to Production Target Setting system (PTSs) of wafer fabrication (Fab). One approach to determine those weighting of each objective that are based on different production phase. This paper attempts to set specific step target for the production line by taking into account the TOMO approach of each WIP and the available tool capacity. This is achieved through the application of Improved Index that is determined by combined dispatching rule through TOMO.
Keywords :
dispatching; integrated circuit manufacture; production control; production equipment; production planning; PTS; TOMO approach; dispatching rule; production target setting system; time-oriented-multiple-objective approach; tool capacity; wafer fabrication; Decision making; Dispatching; Engineering management; Fabrication; Foundries; Industrial engineering; Job shop scheduling; Production systems; Pulp manufacturing; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Print_ISBN :
0-7803-7894-6
DOI :
10.1109/ISSM.2003.1243295
