Title :
Channel waveguides in thin film BaTiO/sub 3/ for a low voltage TE/TM converter
Author :
Izuhara, T. ; Osgood, R.M., Jr. ; Roy, A.N. ; Bakhru, H.
Author_Institution :
Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
Abstract :
Summary from only given. To fabricate a planar waveguide, singly charged helium ions are implanted at energy of 700 keV. The sample is tilted 5/spl deg/ to avoid channeling. Channel waveguides have been formed by etching the implanted planar waveguide with diluted HF. Guided modes are observed in CCD. For precision design of the TE/TM mode converter, the mode shape of such a waveguide is simulated by beam propagation method.
Keywords :
barium compounds; electro-optical devices; etching; ion implantation; optical fabrication; optical films; optical planar waveguides; optical waveguide theory; photorefractive materials; 700 keV; BaTiO/sub 3/; CCD image sensors; He; TE/TM mode converter; beam propagation method; diluted HF etching; etching; implanted planar waveguide; low voltage TE/TM converter; mode shape; precision design; singly charged helium ion implantation; thin film BaTiO/sub 3/; Low voltage; Optical distortion; Optical fiber couplers; Optical fiber devices; Optical fiber losses; Optical fibers; Optical losses; Optical sensors; Tellurium; Transistors;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1033892
