Title :
Development of microbubble monitoring and removal technology in liquid material
Author :
Imai, S.-i. ; Kitabata, M.
Author_Institution :
Manuf. Technol. Center, Matsushita Electr. Ind. Co. Ltd., Toyama, Japan
fDate :
30 Sept.-2 Oct. 2003
Abstract :
It is described that in the supply tube of TARC liquid material, microbubbles can be detected using a conventional liquid particle sensor by taking into account a delay time before coating wafer with TARC film. In this paper, it is shown that the number of microbubbles on a wafer is linearly related to the number of microbubbles passing through the supply tube. Moreover, we show that a novel filter module composed of hollow fibers made of a gas-permeable membrane with a degassing pump is extremely effective in removing the microbubbles in the TARC supply tube.
Keywords :
antireflection coatings; bubbles; filters; integrated circuit manufacture; materials handling equipment; optical sensors; photoresists; process monitoring; production materials; coating wafer; conventional liquid particle sensor; fibers; filter module; gas-permeable membrane; liquid material; microbubble monitoring; microbubbles; removal technology; top anti reflective coating; Biomembranes; Coatings; Filters; Gas detectors; Inspection; Monitoring; Optical films; Optical scattering; Semiconductor films; Semiconductor materials;
Conference_Titel :
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Print_ISBN :
0-7803-7894-6
DOI :
10.1109/ISSM.2003.1243306
