Title :
Microdischarge devices on the 10 ~ 30 /spl mu/m scale: fabrication and applications
Author :
Sung-Jin Park ; Chen, J. ; Chang Liu ; Eden, J.G.
Author_Institution :
University of Illinois
Abstract :
Summary form only given. We have fabricated several types of microdischarge devices and arrays, and from those, unique plasma operation conditions were observed. In particular, as cavity dimensions are decreased from several hundreds to tens of microns, glow discharges are produced at gas pressures up to and beyond one atmosphere. Also, specific power loadings of the plasma can exceed 100 kW-cm-, on a continuous basis.
Keywords :
Cathodes; Electrodes; Micromechanical devices; Optical device fabrication; Optical devices; Optical polymers; Optical waveguides; Optimized production technology; Plasma devices; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1033911
