Correlations of ceria abrasives characteristics between calcination temperature and polishing performance

In this work, cerium oxide particles were prepared, which could be used as polishing abrasives in STI CMP with organic additives. According to the calcinations temperature, abrasive size (both primary and secondary size and material removal rate) were changed drastically. Particularly, defects and micro-scratch during CMP process were also changed according to the abrasive characteristics, which had determined powder synthesis step. Finally, we observed optimum calcination temperature in the point of polishing performance.