DocumentCode :
22667
Title :
Bit Patterned Media at 1 Tdot/in2 and Beyond
Author :
Albrecht, T.R. ; Bedau, Daniel ; Dobisz, E. ; He Gao ; Grobis, Michael ; Hellwig, Olav ; Kercher, Dan ; Lille, Jeffrey ; Marinero, E. ; Patel, K. ; Ruiz, Ricardo ; Schabes, M.E. ; Lei Wan ; Weller, Dieter ; Tsai-Wei Wu
Author_Institution :
San Jose Res. Center, Western Digital Co., San Jose, CA, USA
Volume :
49
Issue :
2
fYear :
2013
fDate :
Feb. 2013
Firstpage :
773
Lastpage :
778
Abstract :
Bit patterned media (BPM) provide an alternative to conventional granular thin film recording media, circumventing the challenges of managing grain size and its associated noise and thermal stability issues in granular media. A viable fabrication strategy involves creation of a master pattern by rotary-stage e-beam lithography and directed self-assembly of block copolymers, followed by pattern replication via UV-cure nanoimprint lithography and pattern transfer to a magnetic thin film by ion beam etching. These steps have been demonstrated for 150 Gdot/cm2 (1 Tdot/in2) hcp patterns, achieving a dot placement tolerance of 1.2 nm 1σ and a defect rate of <; 10-3. Media samples fabricated in this manner from continuous CoCrPt alloy films have achieved a 1σ switching field distribution of 4% of Hc. A 2T medium SNR of nearly 14 dB and a write bit error rate of 2 × 10-3 have been shown using a static tester with a conventional product read/write head. Modeling and experiment suggest that higher recording density can be achieved using BPM with a bit aspect ratio (BAR) >; 1. A master pattern generation generation strategy for BAR>; 1 with rectangular islands is shown using intersecting lines generated by directed self-assembly of lamellar block copolymers in combination with spacer-defined line doubling.
Keywords :
chromium alloys; cobalt alloys; curing; electron beam lithography; error statistics; etching; grain size; ion beam assisted deposition; magnetic domains; magnetic recording noise; magnetic thin films; metallic thin films; nanolithography; platinum alloys; polymer blends; self-assembly; soft lithography; thermal stability; ultraviolet lithography; CoCrPt; UV-cure nanoimprint lithography; bit patterned media; conventional product read-write head; defect rate; directed self-assembly; grain size; granular media; granular thin film recording media; ion beam etching; lamellar block copolymers; magnetic flux density 2 T; magnetic thin film; noise figure 14 dB; noise stability; pattern replication; pattern transfer; rectangular island; rotary-stage e-beam lithography; spacer-defined line doubling; static tester; switching field distribution; thermal stability; write bit error rate; Bit error rate; Magnetic heads; Media; Perpendicular magnetic recording; Signal to noise ratio; Bit error rate; media SNR; nanoimprint; patterned media; self-assembly;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2012.2227303
Filename :
6416979
Link To Document :
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