• DocumentCode
    2267859
  • Title

    A measurement methodology for laser-based thermal diffusivity measurement of advanced multichip module ceramic materials

  • Author

    Kehoe, L. ; Kelly, P.V. ; O´Connor, G.M. ; O´Reilly, M. ; Crean, G.M.

  • Author_Institution
    Nat. Microelectron. Res. Centre, Cork, Ireland
  • fYear
    1995
  • fDate
    7-9 Feb 1995
  • Firstpage
    92
  • Lastpage
    101
  • Abstract
    Alumina derivative ceramics and Low Temperature Co-fired Ceramic (LTCC) electronic MultiChip Module (MCM) packaging substrates have been thermally, optically and morphologically characterised. This paper focuses on the singleand double-sided inspection laser flash thermal diffusivity measurement techniques used to measure the thermal transport properties of the MCM ceramics, and in particular, on the measurement methodology required to measure the thermal diffusivity of these materials by a single-sided inspection laser flash diffusivity method. The paper highlights problems associated with both the measurement system and associated data analysis for the single-sided measurement and data are compared to those measured by an existing (double sided inspection) standard laser flash method. Finally, a preliminary measurement methodology is proposed
  • Keywords
    ceramics; measurement by laser beam; multichip modules; substrates; thermal diffusivity; thermal variables measurement; MCM packaging substrates; alumina derivative ceramics; data analysis; inspection; laser flash method; laser-based thermal diffusivity measurement; low temperature co-fired ceramics; measurement methodology; multichip module ceramic materials; single-sided measurement; thermal transport properties; Ceramics; Data analysis; Electronic packaging thermal management; Inspection; Measurement standards; Measurement techniques; Multichip modules; Optical materials; Particle measurements; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Thermal Measurement and Management Symposium, 1995. SEMI-THERM XI., Eleventh Annual IEEE
  • Conference_Location
    San Jose, CA
  • ISSN
    1065-2221
  • Print_ISBN
    0-7803-2434-X
  • Type

    conf

  • DOI
    10.1109/STHERM.1995.512058
  • Filename
    512058