DocumentCode :
2267859
Title :
A measurement methodology for laser-based thermal diffusivity measurement of advanced multichip module ceramic materials
Author :
Kehoe, L. ; Kelly, P.V. ; O´Connor, G.M. ; O´Reilly, M. ; Crean, G.M.
Author_Institution :
Nat. Microelectron. Res. Centre, Cork, Ireland
fYear :
1995
fDate :
7-9 Feb 1995
Firstpage :
92
Lastpage :
101
Abstract :
Alumina derivative ceramics and Low Temperature Co-fired Ceramic (LTCC) electronic MultiChip Module (MCM) packaging substrates have been thermally, optically and morphologically characterised. This paper focuses on the singleand double-sided inspection laser flash thermal diffusivity measurement techniques used to measure the thermal transport properties of the MCM ceramics, and in particular, on the measurement methodology required to measure the thermal diffusivity of these materials by a single-sided inspection laser flash diffusivity method. The paper highlights problems associated with both the measurement system and associated data analysis for the single-sided measurement and data are compared to those measured by an existing (double sided inspection) standard laser flash method. Finally, a preliminary measurement methodology is proposed
Keywords :
ceramics; measurement by laser beam; multichip modules; substrates; thermal diffusivity; thermal variables measurement; MCM packaging substrates; alumina derivative ceramics; data analysis; inspection; laser flash method; laser-based thermal diffusivity measurement; low temperature co-fired ceramics; measurement methodology; multichip module ceramic materials; single-sided measurement; thermal transport properties; Ceramics; Data analysis; Electronic packaging thermal management; Inspection; Measurement standards; Measurement techniques; Multichip modules; Optical materials; Particle measurements; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Thermal Measurement and Management Symposium, 1995. SEMI-THERM XI., Eleventh Annual IEEE
Conference_Location :
San Jose, CA
ISSN :
1065-2221
Print_ISBN :
0-7803-2434-X
Type :
conf
DOI :
10.1109/STHERM.1995.512058
Filename :
512058
Link To Document :
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