DocumentCode
2268618
Title
Grid evolution for oxidation simulation using a quadtree based grid generator
Author
Sahul, Zakir H. ; McKenna, Eugene W. ; Dutton, Robert W.
Author_Institution
Stanford Univ., CA, USA
fYear
1994
fDate
5-6 Jun 1994
Firstpage
155
Lastpage
158
Abstract
Grid and geometry movement algorithms for oxidation simulation are presented using the grid/geometry server Forest. Initial grid generation is performed using a quadtree region decimation algorithm. An oxidation solver is used to compute node velocities and the maximum time step is determined from geometry and grid considerations. The boundary nodes are then moved and geometry singularities like loop formation and region crashes are detected and removed. All the mesh nodes are moved and retriangulation is performed if necessary. The quadtree is rehashed and new triangles are allocated to conform to the new geometry. This algorithm guarantees a high grid quality at all times with minimal grid changes between time steps
Keywords
mesh generation; oxidation; semiconductor process modelling; simulation; Forest; boundary nodes; geometry movement algorithm; geometry singularities; grid evolution; grid/geometry server; loop formation; oxidation simulation; oxidation solver; quadtree based grid generator; quadtree region decimation algorithm; region crashes; retriangulation; Computational geometry; Computational modeling; Computer crashes; Deformable models; Flowcharts; Grid computing; Interpolation; Mesh generation; Oxidation; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1994. NUPAD V., International Workshop on
Conference_Location
Honolulu, HI
Print_ISBN
0-7803-1867-6
Type
conf
DOI
10.1109/NUPAD.1994.343468
Filename
343468
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