Title :
Grid evolution for oxidation simulation using a quadtree based grid generator
Author :
Sahul, Zakir H. ; McKenna, Eugene W. ; Dutton, Robert W.
Author_Institution :
Stanford Univ., CA, USA
Abstract :
Grid and geometry movement algorithms for oxidation simulation are presented using the grid/geometry server Forest. Initial grid generation is performed using a quadtree region decimation algorithm. An oxidation solver is used to compute node velocities and the maximum time step is determined from geometry and grid considerations. The boundary nodes are then moved and geometry singularities like loop formation and region crashes are detected and removed. All the mesh nodes are moved and retriangulation is performed if necessary. The quadtree is rehashed and new triangles are allocated to conform to the new geometry. This algorithm guarantees a high grid quality at all times with minimal grid changes between time steps
Keywords :
mesh generation; oxidation; semiconductor process modelling; simulation; Forest; boundary nodes; geometry movement algorithm; geometry singularities; grid evolution; grid/geometry server; loop formation; oxidation simulation; oxidation solver; quadtree based grid generator; quadtree region decimation algorithm; region crashes; retriangulation; Computational geometry; Computational modeling; Computer crashes; Deformable models; Flowcharts; Grid computing; Interpolation; Mesh generation; Oxidation; Solid modeling;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1994. NUPAD V., International Workshop on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-1867-6
DOI :
10.1109/NUPAD.1994.343468