Title :
Convergence properties of relaxation versus the surface-Newton generalized-conjugate residual algorithm for self-consistent electromechanical analysis of 3-D micro-electro-mechanical structures
Author :
Yie, H. ; Cai, X. ; White, J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
Electrostatic sensors and microactuators are typically controlled by applied voltages which create electrostatic forces that deform the structure. Therefore, accurately analyzing the performance of these sensors and actuators requires self-consistent electromechanical analysis. However, self-consistent electromechanical analysis is a difficult computational problem because the discretization grid used must track the electrostatically deformed boundaries of the structure. Self-consistent electromechanical analysis of complicated three-dimensional structures can be performed by combining a fast multipole-accelerated scheme for electrostatic analysis with a standard finite-element method for mechanical system analysis. There are two approaches for combining these analyses, one using a straight-forward relaxation scheme, and a second based on a surface-Newton method combined with a matrix-free generalized conjugate residual based solver (SNGCR). In this paper, the convergence properties of these two methods are examined. In particular, we show that relaxation will converge if the applied voltage is small enough, or if Young´s modulus is large enough, but will diverge otherwise. We also show by example that although the SNGCR algorithm is guaranteed to converge only given a sufficiently close initial guess, it converges much more frequently than relaxation
Keywords :
Newton method; conjugate gradient methods; convergence of numerical methods; electrostatic devices; finite element analysis; microactuators; microsensors; relaxation theory; 3D micro-electro-mechanical structure; Young´s modulus; convergence properties; discretization grid; electrostatic microactuators; electrostatic sensors; electrostatically deformed boundaries; fast multipole-accelerated scheme; finite-element method; mechanical system analysis; relaxation scheme; self-consistent electromechanical analysis; surface-Newton generalized-conjugate residual algorithm; Actuators; Convergence; Electromechanical sensors; Electrostatic analysis; Finite element methods; Force control; Grid computing; Microactuators; Performance analysis; Voltage control;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1994. NUPAD V., International Workshop on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-1867-6
DOI :
10.1109/NUPAD.1994.343472