Title :
Diamond milling of micro-optics
Author :
Sweatt, W.C. ; Gill, D.D. ; Adams, D.P. ; Vasile, M.J. ; Claudet, A.A.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
A diamond mill (a tiny end mill) can cut aspheric lenses and mirrors with diameters smaller than 0.5 mm. The cutting tool has a two-dimensional shape and is spun about the axis of the surface to be cut. As the spinning tool is plunged into the substrate, it cuts a radially symmetric surface to sub-micron accuracies. Commercially available circular diamond tools can be modified to aspheric shapes using a focused ion beam. Fabrication examples are presented and the optical performance of an array of micro-lenses are described
Keywords :
aspherical optics; focused ion beam technology; microlenses; micromirrors; milling; aspheric lenses; aspheric shapes; circular diamond tools; diamond milling; focused ion beam; microlenses array; microoptics; mirrors; spinning tool; Cutting tools; Ion beams; Lenses; Milling machines; Mirrors; Optical arrays; Optical device fabrication; Particle beam optics; Shape; Spinning;
Conference_Titel :
Aerospace Conference, 2006 IEEE
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9545-X
DOI :
10.1109/AERO.2006.1655903
