Title :
Proceedings of International Workshop on Numerical Modeling of processes and Devices for Integrated Circuits: NUPAD V
Abstract :
The following topics were dealt with: device modelling; equipment simulation; process simulation; numerical methods; applications; grid methods;
Keywords :
numerical analysis; semiconductor device models; semiconductor process modelling; device modelling; equipment simulation; grid methods; integrated circuits; numerical methods; process simulation;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1994. NUPAD V., International Workshop on
Conference_Location :
Honolulu, HI, USA
Print_ISBN :
0-7803-1867-6
DOI :
10.1109/NUPAD.1994.343505
