• DocumentCode
    2269559
  • Title

    Proceedings of International Workshop on Numerical Modeling of processes and Devices for Integrated Circuits: NUPAD V

  • fYear
    1994
  • fDate
    5-6 June 1994
  • Abstract
    The following topics were dealt with: device modelling; equipment simulation; process simulation; numerical methods; applications; grid methods;
  • Keywords
    numerical analysis; semiconductor device models; semiconductor process modelling; device modelling; equipment simulation; grid methods; integrated circuits; numerical methods; process simulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Modeling of Processes and Devices for Integrated Circuits, 1994. NUPAD V., International Workshop on
  • Conference_Location
    Honolulu, HI, USA
  • Print_ISBN
    0-7803-1867-6
  • Type

    conf

  • DOI
    10.1109/NUPAD.1994.343505
  • Filename
    343505