DocumentCode
2269559
Title
Proceedings of International Workshop on Numerical Modeling of processes and Devices for Integrated Circuits: NUPAD V
fYear
1994
fDate
5-6 June 1994
Abstract
The following topics were dealt with: device modelling; equipment simulation; process simulation; numerical methods; applications; grid methods;
Keywords
numerical analysis; semiconductor device models; semiconductor process modelling; device modelling; equipment simulation; grid methods; integrated circuits; numerical methods; process simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1994. NUPAD V., International Workshop on
Conference_Location
Honolulu, HI, USA
Print_ISBN
0-7803-1867-6
Type
conf
DOI
10.1109/NUPAD.1994.343505
Filename
343505
Link To Document