DocumentCode
2270152
Title
Experimental study of XUV laser produced plasma sheet for a microwave agile mirror application
Author
Shen, W. ; Scharer, J.E. ; Porter, B.G. ; Lam, N.T. ; Kelly, K.L.
Author_Institution
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
fYear
1995
fDate
5-8 June 1995
Firstpage
139
Abstract
Summary form only. An excimer-laser (/spl lambda/=193 nm, r=17 nS, E=20 mJ) along with a cylindrical lens system is utilized to produce a sheet plasma, in an organic gas (TMAE). The plasma has a peak density of 3.5/spl times/10/sup 13/ cm/sup -3/ and a "sheet" like profile of 0.2-0.7 cm/spl times/8 cm/spl times/20 cm. The effect of the lens system on the plasma, sheet thickness is examined. The triple probe measured plasma temperature (T/sub e//spl ap/1 eV) agrees with the postulation of single-photon absorption-ionization process. The plasma density spatial decay along the laser beam, which is associated with TMAE photon absorption length, is measured. The absorption length is found to be a function of base pressure of the neutral working gas. We have obtained an optimal window of TMAE base pressure at 50-150 mTorr. Within this optimal pressure range a plasma formation can have a long absorption length (L/sub a//spl ges/10 cm), relatively high plasma density (n/sub e//spl ges/5/spl times/10/sup 12/ cm/sup -3/), and lifetime of 5 /spl mu/s. A 1-D plasma diffusion model is proposed and solved both analytically and numerically. Comparison of the modeling and the measured results yields accurate values for the plasma diffusion and recombination coefficients.
Keywords
plasma applications; plasma density; plasma diagnostics; plasma production by laser; plasma temperature; temperature; 1 eV; 193 nm; 20 mJ; 50 to 150 mtorr; XUV laser produced plasma sheet; analytical solutions; cylindrical lens system; density; excimer-laser; laser beam; microwave agile mirror; modeling; numerical solutions; organic gas; photon absorption length; plasma density spatial decay; plasma diffusion; plasma formation; plasma temperature; recombination; sheet like profile; single-photon absorption-ionization process; triple probe; Absorption; Gas lasers; Lenses; Particle beam measurements; Particle beams; Plasma density; Plasma measurements; Plasma temperature; Probes; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1995. IEEE Conference Record - Abstracts., 1995 IEEE International Conference on
Conference_Location
Madison, WI, USA
ISSN
0730-9244
Print_ISBN
0-7803-2669-5
Type
conf
DOI
10.1109/PLASMA.1995.531568
Filename
531568
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