• DocumentCode
    2270152
  • Title

    Experimental study of XUV laser produced plasma sheet for a microwave agile mirror application

  • Author

    Shen, W. ; Scharer, J.E. ; Porter, B.G. ; Lam, N.T. ; Kelly, K.L.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
  • fYear
    1995
  • fDate
    5-8 June 1995
  • Firstpage
    139
  • Abstract
    Summary form only. An excimer-laser (/spl lambda/=193 nm, r=17 nS, E=20 mJ) along with a cylindrical lens system is utilized to produce a sheet plasma, in an organic gas (TMAE). The plasma has a peak density of 3.5/spl times/10/sup 13/ cm/sup -3/ and a "sheet" like profile of 0.2-0.7 cm/spl times/8 cm/spl times/20 cm. The effect of the lens system on the plasma, sheet thickness is examined. The triple probe measured plasma temperature (T/sub e//spl ap/1 eV) agrees with the postulation of single-photon absorption-ionization process. The plasma density spatial decay along the laser beam, which is associated with TMAE photon absorption length, is measured. The absorption length is found to be a function of base pressure of the neutral working gas. We have obtained an optimal window of TMAE base pressure at 50-150 mTorr. Within this optimal pressure range a plasma formation can have a long absorption length (L/sub a//spl ges/10 cm), relatively high plasma density (n/sub e//spl ges/5/spl times/10/sup 12/ cm/sup -3/), and lifetime of 5 /spl mu/s. A 1-D plasma diffusion model is proposed and solved both analytically and numerically. Comparison of the modeling and the measured results yields accurate values for the plasma diffusion and recombination coefficients.
  • Keywords
    plasma applications; plasma density; plasma diagnostics; plasma production by laser; plasma temperature; temperature; 1 eV; 193 nm; 20 mJ; 50 to 150 mtorr; XUV laser produced plasma sheet; analytical solutions; cylindrical lens system; density; excimer-laser; laser beam; microwave agile mirror; modeling; numerical solutions; organic gas; photon absorption length; plasma density spatial decay; plasma diffusion; plasma formation; plasma temperature; recombination; sheet like profile; single-photon absorption-ionization process; triple probe; Absorption; Gas lasers; Lenses; Particle beam measurements; Particle beams; Plasma density; Plasma measurements; Plasma temperature; Probes; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1995. IEEE Conference Record - Abstracts., 1995 IEEE International Conference on
  • Conference_Location
    Madison, WI, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2669-5
  • Type

    conf

  • DOI
    10.1109/PLASMA.1995.531568
  • Filename
    531568