• DocumentCode
    2270794
  • Title

    Immobilized macromolecule detection through quadrature microdiffraction

  • Author

    Varma, M.M. ; Nolte, D.D. ; Inerowicz, H.D. ; Regnier, F.E.

  • Author_Institution
    Dept. of Phys., Purdue Univ., West Lafayette, IN, USA
  • fYear
    2002
  • fDate
    24-24 May 2002
  • Abstract
    Summary form only given. We demonstrate the fabrication of microstructures on silicon that act as individual microscopic interferometers all operating in quadrature. These microstructures can have dimensions less than a micron, making it possible to fabricate over a billion interferometer elements on single disk the size of a compact disk.. To test the feasibility of detecting biohazards and antigens using this approach, we fabricated a 3-inch silicon wafer with 1024 microstrips of gold, each 20 microns wide and 3 cm long, arranged radially like spokes on a wheel.
  • Keywords
    biological techniques; biosensors; light diffraction; light interferometry; molecular biophysics; nanolithography; Au; Au microstrips; Si; Si wafer; antigens; billion interferometer elements; biohazards; dimensions; fabrication; immobilized macromolecule detection; individual microscopic interferometers; microstructures; quadrature microdiffraction; single disk; Biohazards; CD recording; Fabrication; Gold; Interferometers; Microscopy; Microstrip; Microstructure; Silicon; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
  • Conference_Location
    Long Beach, CA, USA
  • Print_ISBN
    1-55752-706-7
  • Type

    conf

  • DOI
    10.1109/CLEO.2002.1034138
  • Filename
    1034138