A novel calibration verification procedure for millimeter-wave measurements

A novel calibration procedure is presented for microstrip on-wafer SOLT calibration standards. In this procedure, an on-wafer multiline TRL calibration is used to measure on-wafer SOLT calibration standards. The measurements are compared to electromagnetic simulations of the SOLT standards. An SOLT calibration standard model is derived and used to measure on-wafer offset SOL standards. Close agreement of the SOLT standard measurements and the offset SOL measurements to electromagnetic simulated data provides verification, Accuracy of this calibration procedure is documented up to 75 GHz.