A novel calibration verification procedure for millimeter-wave measurements

Author

DuFault, M.D. ; Sharma, A.K.

Author_Institution

TRW Electron. Syst. & Technol. Div., Redondo Beach, CA, USA

Volume

3

fYear

1996

fDate

17-21 June 1996

Firstpage

1391

Abstract

A novel calibration procedure is presented for microstrip on-wafer SOLT calibration standards. In this procedure, an on-wafer multiline TRL calibration is used to measure on-wafer SOLT calibration standards. The measurements are compared to electromagnetic simulations of the SOLT standards. An SOLT calibration standard model is derived and used to measure on-wafer offset SOL standards. Close agreement of the SOLT standard measurements and the offset SOL measurements to electromagnetic simulated data provides verification, Accuracy of this calibration procedure is documented up to 75 GHz.

Keywords

MIMIC; S-parameters; calibration; integrated circuit measurement; measurement standards; millimetre wave measurement; 30 to 75 GHz; calibration standards; calibration verification procedure; electromagnetic simulations; microstrip on-wafer SOLT calibration; millimeter-wave measurements; offset SOL measurements; on-wafer multiline TRL calibration; short open load and thru; thru reflect line; Calibration; Electromagnetic measurements; Frequency measurement; Measurement standards; Microstrip; Millimeter wave measurements; Millimeter wave technology; Probes; Scattering parameters; Space technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1996., IEEE MTT-S International

Conference_Location

San Francisco, CA, USA

ISSN

0149-645X

Print_ISBN

0-7803-3246-6

Type

conf

DOI

10.1109/MWSYM.1996.512195

Filename

512195