DocumentCode
2271302
Title
Development of a coplanar waveguide membrane probe for non-destructive evaluation of thin film structures
Author
Seltmann, E.W. ; Laskar, J. ; Smith, K.
Author_Institution
Sch. of Electr. Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Volume
3
fYear
1996
fDate
17-21 June 1996
Firstpage
1411
Abstract
A novel prototype membrane coplanar waveguide probe (MCPW) has been designed and fabricated to characterize the dielectric properties of multi-layer thin film structures. The MCPW provides a convenient nondestructive technique to extract the dielectric properties of substrates as thin as 5 mils to 20 GHz. We present the design and analysis of the MCPW and demonstrate feasibility of this new approach.
Keywords
coplanar waveguides; dielectric measurement; membranes; microwave measurement; probes; test equipment; thin film devices; waveguide components; 0 to 20 GHz; 5 mil; CPW membrane probe; coplanar waveguide probe; dielectric properties; multilayer thin film structures; non-destructive evaluation; nondestructive technique; substrates; Admittance; Biomembranes; Coplanar waveguides; Dielectric materials; Dielectric measurements; Dielectric substrates; Dielectric thin films; Probes; Testing; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location
San Francisco, CA, USA
ISSN
0149-645X
Print_ISBN
0-7803-3246-6
Type
conf
DOI
10.1109/MWSYM.1996.512200
Filename
512200
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