Title :
The effects of in-elastic processes on electron temperature in electron beam generated plasmas
Author :
Boris, D.R. ; Petrov, G.M. ; Lock, E.H. ; Petrova, Tz B. ; Fernsler, R.F. ; Walton, S.G.
Author_Institution :
Plasma Phys. Div., Naval Res. Lab., Washington, DC, USA
Abstract :
Summary form only given. Electron beam generated plasmas have a variety of unique features that make them distinctive plasma sources for materials processing. In these plasmas the electron beam rather than an applied electric field is the energy source that drives ionization resulting in inherently low electron temperatures (0.2-1 eV). This work will focus on the role that trace ad-mixtures of molecular gas play in controlling kTe in electron beam generated plasmas. Mixtures of Ar/N2 and Ar/SF6 are examined with attention paid to changes in the electron energy distribution function (EEDF) resulting from vibrational cooling (Ar/N2) and electron attachment (Ar/SF6) and how those changes in the EEDF influence plasma characteristics.
Keywords :
argon; electron beams; gas mixtures; nitrogen; plasma sources; plasma temperature; sulphur compounds; Ar-N2; Ar-SF6; argon-nitrogen mixtures; distinctive plasma sources; electric field; electron attachment; electron beam generated plasmas; electron energy distribution function; electron temperature; electron volt energy 0.2 eV to 1 eV; energy source; in-elastic process effects; ionization; material processing; molecular gas; sulfur hexaflouride; vibrational cooling; Electron beams; Laboratories; Plasma sources; Plasma temperature; Sulfur hexafluoride;
Conference_Titel :
Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS), 2014 IEEE 41st International Conference on
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-2711-1
DOI :
10.1109/PLASMA.2014.7012228
