Title :
Spotlights on recent developments in microsystem technology
Author_Institution :
Inst. for Microtechnol., Tech. Univ. of Braunschweig, Germany
Abstract :
Microsystem technology introduces a new way of integration of sensors, actuators, and information processing components resulting in flexible, adaptive, and intelligent systems similar to those created by nature. The paper attempts to give a general idea of what is feasible with this technology. After a short introduction, the key technologies for the fabrication of microsystems are described and illustrated by several examples of present day applications
Keywords :
digital integrated circuits; information processing components; intelligent systems; microsystem technology; Actuators; Biological materials; Biomembranes; Etching; Fabrication; Ferroelectric materials; Integrated circuit technology; Microelectronics; Sensor systems; Silicon;
Conference_Titel :
Design Automation Conference, 1996, with EURO-VHDL '96 and Exhibition, Proceedings EURO-DAC '96, European
Conference_Location :
Geneva
Print_ISBN :
0-8186-7573-X
DOI :
10.1109/EURDAC.1996.558216
