Title :
On-wafer measurement at millimeter wave frequencies
Author :
Williams, D.F. ; Belquin, J.-M. ; Dambrine, G. ; Fenton, R.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Abstract :
We investigate millimeter wave on-wafer calibration and measurement in coplanar waveguide and demonstrate the applicability of the multiline thru-reflect-line calibration and good measurement repeatability between laboratories. We also investigate calibrations in conductor-backed coplanar waveguide.
Keywords :
calibration; coplanar waveguides; millimetre wave measurement; conductor-backed coplanar waveguide; millimeter wave on-wafer measurement; multiline thru-reflect-line calibration; Calibration; Conductors; Coplanar waveguides; Frequency measurement; Gallium arsenide; Loss measurement; Millimeter wave measurements; Millimeter wave technology; Surface waves; Thickness measurement;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.512264
