Title :
UGIM 2008 [Title page]
Abstract :
The following topics are dealt with: electrowetting - novel devices and applications; cleanroom facilities and infrastructure; semiconductor devices; university micro-nano curriculum development; MEMS sensors and actuators; wireless MEMS/NEMS; optical devices; processing and materials for micro-nano technology; lab-on-a-chip devices and systems.
Keywords :
clean rooms; educational courses; engineering education; lab-on-a-chip; micromechanical devices; nanotechnology; semiconductor devices; wetting; MEMS sensors; actuators; applications; cleanroom facilities; electrowetting; infrastructure; lab-on-a-chip; materials; micro-nano technology; optical devices; processing; semiconductor devices; university micro-nano curriculum development; wireless MEMS; wireless NEMS;
Conference_Titel :
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location :
Louisville, KY
Print_ISBN :
978-1-4244-2484-9
DOI :
10.1109/UGIM.2008.1
