Title :
Micro-machining in submillimeter-wave circuits
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
Abstract :
Micro-machining technology has been used in submillimeter-wave circuits for more than ten years, but it is just beginning to appear in receivers on radio telescopes. A variety of rod, membrane, slot, and horn antennas have been demonstrated, together with hollow-metal guides and sliding shorts. Recently, a micro-machined waveguide receiver with a SIS junction on a 1-/spl mu/m membrane has been demonstrated at 850 GHz with a DSB noise temperature of 450 K.
Keywords :
circuit tuning; horn antennas; membranes; micromachining; micromechanical devices; slot antennas; submillimetre wave antennas; submillimetre wave circuits; submillimetre wave devices; submillimetre wave receivers; superconductor-insulator-superconductor devices; waveguide components; 1 micron; 850 GHz; SIS junction; THF; hollow-metal guides; horn antennas; membrane antennas; micromachining technology; radio telescopes; rod antennas; sliding short; slot antennas; submillimeter-wave circuits; waveguide receiver; Biomembranes; Horn antennas; Radio astronomy; Receivers; Slot antennas; Space technology; Submillimeter wave circuits; Submillimeter wave technology; Temperature; Waveguide junctions;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.512315
