A low cost and low power silicon npn bipolar process with NMOS transistors and its wireless applications

Author

O, K. ; Tewksbury, T. ; Dawe, G. ; Tsai, C. ; Garone, P. ; Scharf, B. ; Kermarrec, C. ; Yasaitis, J.

Author_Institution

Analog Devices Inc., Wilmington, MA, USA

fYear

1995

fDate

20-22 Feb. 1995

Firstpage

93

Lastpage

98

Abstract

Microwave and dc characteristics, and wireless applications of a low cost and low power silicon bipolar process with NMOS transistors are described. The process features 25-GHz double-polysilicon self-aligned npn bipolar transistors with 5.5-V BV/sub CEO/, optional 0.7-/spl mu/m NMOS transistors with p/sup +/ polysilicon gate for switch applications, lateral pnp transistors, high and low valued resistors, inductors, and p/sup +/ polysilicon-to-n/sup +/ plug capacitors. The RF and microwave capabilities of the process up to several GHz are demonstrated by fabricating and characterizing RF amplifiers, low noise amplifiers, and RF switches.

Keywords

BIMOS integrated circuits; MMIC amplifiers; UHF amplifiers; UHF integrated circuits; bipolar MMIC; elemental semiconductors; field effect transistor switches; integrated circuit technology; microwave amplifiers; silicon; 0.7 micron; 2.4 GHz; 25 GHz; 5.5 V; 800 MHz; 900 MHz; DC characteristics; NMOS transistors; RF amplifiers; RF capabilities; RF switches; Si; Si npn bipolar process; UHF; double-polysilicon self-aligned npn bipolar transistors; fabrication; lateral pnp transistors; low cost process; low noise amplifiers; low power; microwave capabilities; microwave characteristics; p/sup +/ polysilicon gate; p/sup +/ polysilicon-to-n/sup +/ plug capacitors; switch applications; wireless applications; Bipolar transistors; Costs; MOS devices; MOSFETs; Microwave transistors; Radio frequency; Radiofrequency amplifiers; Resistors; Silicon; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Technologies for Wireless Applications Digest, 1995., MTT-S Symposium on

Conference_Location

Vancouver, BC, Canada

Print_ISBN

0-7803-1982-6

Type

conf

DOI

10.1109/MTTTWA.1995.512332

Filename

512332