Title :
Elemental analysis of the surface during plasma irradiation
Author :
Mamedov, N.V. ; Kurnaev, V.A. ; Sinelnikov, D.N. ; Kolodko, Dobrynya V.
Author_Institution :
Moscow Eng. & Phys. Inst., Nat. Nucl. Res. Univ., Moscow, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
In-situ non-destructive method of surface analysis at plasma/ion treatment is presented. A differentially pumped energy analyzer is used for ion scattering and ionized recoil spectroscopy under grazing incidence conditions in automated ion mass monochromator. Build in Penning plasma source is used for plasma/ion treatment of targets.
Keywords :
mass spectroscopic chemical analysis; nondestructive testing; plasma materials processing; plasma sources; surface treatment; Penning plasma source; automated ion mass monochromator; differentially pumped energy analyzer; grazing incidence conditions; in-situ nondestructive method; ion scattering; ion treatment; ionized recoil spectroscopy; plasma irradiation; plasma treatment; surface elemental analysis; Gases; Impurities; Ions; Plasmas; Radiation effects; Spectroscopy; Surface treatment;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
DOI :
10.1109/IVESC.2014.6892031
