Title :
MEMS Fabrication Course for Pressure Sensors, Flow Sensors, Fluidic Channels and Micro-Pumps
Author :
Pearson, Robert E. ; Fuller, Lynn F. ; Puchades, Ivan
Author_Institution :
Microelectron. Eng. Dept., Rochester Inst. of Technol., Rochester, NY
Abstract :
This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for pressure sensors, flow sensors, micro-pumps, and micro- fluidic packaging in a ten week fabrication course are reported.
Keywords :
educational courses; engineering education; flow sensors; microfluidics; micromachining; micropumps; microsensors; pressure sensors; MEMS fabrication course; Microelectronic Engineering Department; Rochester Institute of Technology; bulk micromachining; flow sensors; fluidic channels; micro-electro-mechanical system; micropumps; pressure sensors; process flow; Fabrication; Fluidic microsystems; Microelectromechanical systems; Microelectronics; Microfluidics; Micromechanical devices; Micropumps; Packaging machines; Reliability engineering; Testing;
Conference_Titel :
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location :
Louisville, KY
Print_ISBN :
978-1-4244-2484-9
Electronic_ISBN :
978-1-4244-2485-6
DOI :
10.1109/UGIM.2008.26
