MEMS Fabrication Course for Pressure Sensors, Flow Sensors, Fluidic Channels and Micro-Pumps

Author

Pearson, Robert E. ; Fuller, Lynn F. ; Puchades, Ivan

Author_Institution

Microelectron. Eng. Dept., Rochester Inst. of Technol., Rochester, NY

fYear

2008

fDate

13-16 July 2008

Firstpage

70

Lastpage

74

Abstract

This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for pressure sensors, flow sensors, micro-pumps, and micro- fluidic packaging in a ten week fabrication course are reported.

Keywords

educational courses; engineering education; flow sensors; microfluidics; micromachining; micropumps; microsensors; pressure sensors; MEMS fabrication course; Microelectronic Engineering Department; Rochester Institute of Technology; bulk micromachining; flow sensors; fluidic channels; micro-electro-mechanical system; micropumps; pressure sensors; process flow; Fabrication; Fluidic microsystems; Microelectromechanical systems; Microelectronics; Microfluidics; Micromechanical devices; Micropumps; Packaging machines; Reliability engineering; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial

Conference_Location

Louisville, KY

Print_ISBN

978-1-4244-2484-9

Electronic_ISBN

978-1-4244-2485-6

Type

conf

DOI

10.1109/UGIM.2008.26

Filename

4573204