Title :
MEMS Courses for Undergraduates
Author :
Siahmakoun, Azad ; Miller, Aaron
Author_Institution :
Dept. of Phys. & Opt. EngineeringMicro-Nanoscale Devices & Syst., Rose-Hulman Inst. of Technol., Terre Haute, IN
Abstract :
Two MEMS courses have been developed for all science and engineering majors to learn basics of design, fabrication, and characterization of MEMS devices. The first course introduction to MEMS is to introduce the essentials of microfabrication technique by making heat actuators for laboratory component. While the second course, Advanced Topics in MEMS, covers in depth modeling, process flow, photolithography, and microfluidics with projects for the laboratory components.
Keywords :
educational courses; electronic engineering education; microfluidics; micromechanical devices; photolithography; MEMS device design; depth modeling; heat actuators; microfabrication technique; microfluidics; photolithography; process flow; undergraduate courses; Biomedical optical imaging; Chemistry; Design engineering; Fabrication; Laboratories; Microelectromechanical devices; Micromachining; Micromechanical devices; Optical devices; Physics;
Conference_Titel :
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location :
Louisville, KY
Print_ISBN :
978-1-4244-2484-9
Electronic_ISBN :
978-1-4244-2485-6
DOI :
10.1109/UGIM.2008.29
